JPH0183067U - - Google Patents
Info
- Publication number
- JPH0183067U JPH0183067U JP1987176166U JP17616687U JPH0183067U JP H0183067 U JPH0183067 U JP H0183067U JP 1987176166 U JP1987176166 U JP 1987176166U JP 17616687 U JP17616687 U JP 17616687U JP H0183067 U JPH0183067 U JP H0183067U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- workpiece
- electrode
- vacuum container
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176166U JPH0183067U (en]) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176166U JPH0183067U (en]) | 1987-11-18 | 1987-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183067U true JPH0183067U (en]) | 1989-06-02 |
Family
ID=31467920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176166U Pending JPH0183067U (en]) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183067U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014025117A (ja) * | 2012-07-27 | 2014-02-06 | Yuutekku:Kk | プラズマｃｖｄ装置及び磁気記録媒体の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57203781A (en) * | 1981-06-10 | 1982-12-14 | Jeol Ltd | Plasma working device |
| JPS61281882A (ja) * | 1985-06-07 | 1986-12-12 | Fuji Electric Co Ltd | 乾式薄膜加工装置 |
-
1987
- 1987-11-18 JP JP1987176166U patent/JPH0183067U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57203781A (en) * | 1981-06-10 | 1982-12-14 | Jeol Ltd | Plasma working device |
| JPS61281882A (ja) * | 1985-06-07 | 1986-12-12 | Fuji Electric Co Ltd | 乾式薄膜加工装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014025117A (ja) * | 2012-07-27 | 2014-02-06 | Yuutekku:Kk | プラズマｃｖｄ装置及び磁気記録媒体の製造方法 |